VLS Silicon Nanowires based Resistors for Chemical Sensor Applications
نویسندگان
چکیده
منابع مشابه
Silicon Nanowires Based Resistors for Bacteria Detection
Silicon nanowires (SiNWs) based resistors used as bacteria sensors are fabricated using the classical silicon technologies. SiNWs are grown by vapor liquid solid (VLS) method using gold as catalyst. Electrodes of the device are made of heavily in-situ doped polycristalline silicon. Results show potential use of the corresponding resistors, with SiNWs as sensitive units, for bacteria detection. ...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2012
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.09.128